JPS63190914U - - Google Patents
Info
- Publication number
- JPS63190914U JPS63190914U JP8079887U JP8079887U JPS63190914U JP S63190914 U JPS63190914 U JP S63190914U JP 8079887 U JP8079887 U JP 8079887U JP 8079887 U JP8079887 U JP 8079887U JP S63190914 U JPS63190914 U JP S63190914U
- Authority
- JP
- Japan
- Prior art keywords
- scale plate
- scale
- light
- optical position
- relative movement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 6
- 238000006073 displacement reaction Methods 0.000 claims 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8079887U JPS63190914U (de) | 1987-05-29 | 1987-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8079887U JPS63190914U (de) | 1987-05-29 | 1987-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63190914U true JPS63190914U (de) | 1988-12-08 |
Family
ID=30931936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8079887U Pending JPS63190914U (de) | 1987-05-29 | 1987-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63190914U (de) |
-
1987
- 1987-05-29 JP JP8079887U patent/JPS63190914U/ja active Pending