JPS63190895U - - Google Patents
Info
- Publication number
- JPS63190895U JPS63190895U JP8046687U JP8046687U JPS63190895U JP S63190895 U JPS63190895 U JP S63190895U JP 8046687 U JP8046687 U JP 8046687U JP 8046687 U JP8046687 U JP 8046687U JP S63190895 U JPS63190895 U JP S63190895U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- vapor deposition
- sheet
- main component
- natural graphite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 229910021382 natural graphite Inorganic materials 0.000 claims description 2
- 230000008021 deposition Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Description
第１図、第２図、第３図及び第４図は本考案の
蒸着用ルツボの縦断面図である。
符号の説明、１……蒸着用ルツボの上端面、２
……蒸着用ルツボの内面、３……天然黒鉛を主成
分とするシート状物。
1, 2, 3, and 4 are longitudinal sectional views of the deposition crucible of the present invention. Explanation of symbols, 1... Upper end surface of crucible for vapor deposition, 2
...Inner surface of the crucible for vapor deposition, 3...Sheet-like material whose main component is natural graphite.
Claims (1)
天然黒鉛を主成分とするシート状物を装着して成
ることを特徴とする蒸着用ルツボ。 A crucible for vapor deposition, characterized in that a sheet-like material containing natural graphite as a main component is attached to part or all of the upper end surface and inner surface of the crucible body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8046687U JPS63190895U (en) | 1987-05-27 | 1987-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8046687U JPS63190895U (en) | 1987-05-27 | 1987-05-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63190895U true JPS63190895U (en) | 1988-12-08 |
Family
ID=30931296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8046687U Pending JPS63190895U (en) | 1987-05-27 | 1987-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63190895U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5858278A (en) * | 1981-10-02 | 1983-04-06 | Hitachi Chem Co Ltd | Melting method for metal |
-
1987
- 1987-05-27 JP JP8046687U patent/JPS63190895U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5858278A (en) * | 1981-10-02 | 1983-04-06 | Hitachi Chem Co Ltd | Melting method for metal |