JPS63190895U - - Google Patents

Info

Publication number
JPS63190895U
JPS63190895U JP8046687U JP8046687U JPS63190895U JP S63190895 U JPS63190895 U JP S63190895U JP 8046687 U JP8046687 U JP 8046687U JP 8046687 U JP8046687 U JP 8046687U JP S63190895 U JPS63190895 U JP S63190895U
Authority
JP
Japan
Prior art keywords
crucible
vapor deposition
sheet
main component
natural graphite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8046687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8046687U priority Critical patent/JPS63190895U/ja
Publication of JPS63190895U publication Critical patent/JPS63190895U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
JP8046687U 1987-05-27 1987-05-27 Pending JPS63190895U (US06534493-20030318-C00184.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8046687U JPS63190895U (US06534493-20030318-C00184.png) 1987-05-27 1987-05-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8046687U JPS63190895U (US06534493-20030318-C00184.png) 1987-05-27 1987-05-27

Publications (1)

Publication Number Publication Date
JPS63190895U true JPS63190895U (US06534493-20030318-C00184.png) 1988-12-08

Family

ID=30931296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8046687U Pending JPS63190895U (US06534493-20030318-C00184.png) 1987-05-27 1987-05-27

Country Status (1)

Country Link
JP (1) JPS63190895U (US06534493-20030318-C00184.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5858278A (ja) * 1981-10-02 1983-04-06 Hitachi Chem Co Ltd カ−ボンるつぼ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5858278A (ja) * 1981-10-02 1983-04-06 Hitachi Chem Co Ltd カ−ボンるつぼ

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