JPS63188948U - - Google Patents
Info
- Publication number
- JPS63188948U JPS63188948U JP1987080438U JP8043887U JPS63188948U JP S63188948 U JPS63188948 U JP S63188948U JP 1987080438 U JP1987080438 U JP 1987080438U JP 8043887 U JP8043887 U JP 8043887U JP S63188948 U JPS63188948 U JP S63188948U
- Authority
- JP
- Japan
- Prior art keywords
- stem
- container
- semiconductor devices
- rotation stage
- positioning device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987080438U JPS63188948U (enExample) | 1987-05-26 | 1987-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987080438U JPS63188948U (enExample) | 1987-05-26 | 1987-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63188948U true JPS63188948U (enExample) | 1988-12-05 |
Family
ID=30931244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987080438U Pending JPS63188948U (enExample) | 1987-05-26 | 1987-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63188948U (enExample) |
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1987
- 1987-05-26 JP JP1987080438U patent/JPS63188948U/ja active Pending