JPS63188939U - - Google Patents

Info

Publication number
JPS63188939U
JPS63188939U JP8035887U JP8035887U JPS63188939U JP S63188939 U JPS63188939 U JP S63188939U JP 8035887 U JP8035887 U JP 8035887U JP 8035887 U JP8035887 U JP 8035887U JP S63188939 U JPS63188939 U JP S63188939U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
resist
resist coating
attracted
back side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8035887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8035887U priority Critical patent/JPS63188939U/ja
Publication of JPS63188939U publication Critical patent/JPS63188939U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP8035887U 1987-05-27 1987-05-27 Pending JPS63188939U (US08063081-20111122-C00044.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8035887U JPS63188939U (US08063081-20111122-C00044.png) 1987-05-27 1987-05-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8035887U JPS63188939U (US08063081-20111122-C00044.png) 1987-05-27 1987-05-27

Publications (1)

Publication Number Publication Date
JPS63188939U true JPS63188939U (US08063081-20111122-C00044.png) 1988-12-05

Family

ID=30931093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8035887U Pending JPS63188939U (US08063081-20111122-C00044.png) 1987-05-27 1987-05-27

Country Status (1)

Country Link
JP (1) JPS63188939U (US08063081-20111122-C00044.png)

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