JPS63188561U - - Google Patents
Info
- Publication number
- JPS63188561U JPS63188561U JP1987078778U JP7877887U JPS63188561U JP S63188561 U JPS63188561 U JP S63188561U JP 1987078778 U JP1987078778 U JP 1987078778U JP 7877887 U JP7877887 U JP 7877887U JP S63188561 U JPS63188561 U JP S63188561U
- Authority
- JP
- Japan
- Prior art keywords
- rate sensor
- sensor according
- hot wire
- gas rate
- wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001886 ciliary effect Effects 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000007747 plating Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
Landscapes
- Reciprocating Pumps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987078778U JPS63188561U (cs) | 1987-05-27 | 1987-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987078778U JPS63188561U (cs) | 1987-05-27 | 1987-05-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63188561U true JPS63188561U (cs) | 1988-12-02 |
Family
ID=30928029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987078778U Pending JPS63188561U (cs) | 1987-05-27 | 1987-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63188561U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02294576A (ja) * | 1989-05-10 | 1990-12-05 | Nippon Keiki Seisakusho:Kk | 温度調節機能付圧電ポンプ |
-
1987
- 1987-05-27 JP JP1987078778U patent/JPS63188561U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02294576A (ja) * | 1989-05-10 | 1990-12-05 | Nippon Keiki Seisakusho:Kk | 温度調節機能付圧電ポンプ |