JPS6318840U - - Google Patents
Info
- Publication number
- JPS6318840U JPS6318840U JP11113086U JP11113086U JPS6318840U JP S6318840 U JPS6318840 U JP S6318840U JP 11113086 U JP11113086 U JP 11113086U JP 11113086 U JP11113086 U JP 11113086U JP S6318840 U JPS6318840 U JP S6318840U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- pair
- side walls
- flange
- walls
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11113086U JPS6318840U (tr) | 1986-07-19 | 1986-07-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11113086U JPS6318840U (tr) | 1986-07-19 | 1986-07-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6318840U true JPS6318840U (tr) | 1988-02-08 |
Family
ID=30990770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11113086U Pending JPS6318840U (tr) | 1986-07-19 | 1986-07-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6318840U (tr) |
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1986
- 1986-07-19 JP JP11113086U patent/JPS6318840U/ja active Pending