JPS6318733U - - Google Patents

Info

Publication number

JPS6318733U

JPS6318733U JP11190086U JP11190086U JPS6318733U JP S6318733 U JPS6318733 U JP S6318733U JP 11190086 U JP11190086 U JP 11190086U JP 11190086 U JP11190086 U JP 11190086U JP S6318733 U JPS6318733 U JP S6318733U

Authority

JP

Japan

Prior art keywords

diaphragm

substrate

electrode

predetermined displacement

portions

Prior art date

1986-07-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 7
• 238000006073 displacement reaction Methods 0.000 claims 2
• 238000010586 diagram Methods 0.000 description 6

Cited By (1)