JPS63187337U - - Google Patents
Info
- Publication number
- JPS63187337U JPS63187337U JP1987077352U JP7735287U JPS63187337U JP S63187337 U JPS63187337 U JP S63187337U JP 1987077352 U JP1987077352 U JP 1987077352U JP 7735287 U JP7735287 U JP 7735287U JP S63187337 U JPS63187337 U JP S63187337U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- vacuum suction
- back side
- wafer holder
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987077352U JPS63187337U (enExample) | 1987-05-25 | 1987-05-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987077352U JPS63187337U (enExample) | 1987-05-25 | 1987-05-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63187337U true JPS63187337U (enExample) | 1988-11-30 |
Family
ID=30925275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987077352U Pending JPS63187337U (enExample) | 1987-05-25 | 1987-05-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63187337U (enExample) |
-
1987
- 1987-05-25 JP JP1987077352U patent/JPS63187337U/ja active Pending