JPS63187337U - - Google Patents

Info

Publication number
JPS63187337U
JPS63187337U JP7735287U JP7735287U JPS63187337U JP S63187337 U JPS63187337 U JP S63187337U JP 7735287 U JP7735287 U JP 7735287U JP 7735287 U JP7735287 U JP 7735287U JP S63187337 U JPS63187337 U JP S63187337U
Authority
JP
Japan
Prior art keywords
wafer
vacuum suction
back side
wafer holder
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7735287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7735287U priority Critical patent/JPS63187337U/ja
Publication of JPS63187337U publication Critical patent/JPS63187337U/ja
Pending legal-status Critical Current

Links

JP7735287U 1987-05-25 1987-05-25 Pending JPS63187337U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7735287U JPS63187337U (enrdf_load_stackoverflow) 1987-05-25 1987-05-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7735287U JPS63187337U (enrdf_load_stackoverflow) 1987-05-25 1987-05-25

Publications (1)

Publication Number Publication Date
JPS63187337U true JPS63187337U (enrdf_load_stackoverflow) 1988-11-30

Family

ID=30925275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7735287U Pending JPS63187337U (enrdf_load_stackoverflow) 1987-05-25 1987-05-25

Country Status (1)

Country Link
JP (1) JPS63187337U (enrdf_load_stackoverflow)

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