JPS63187336U - - Google Patents

Info

Publication number
JPS63187336U
JPS63187336U JP7800487U JP7800487U JPS63187336U JP S63187336 U JPS63187336 U JP S63187336U JP 7800487 U JP7800487 U JP 7800487U JP 7800487 U JP7800487 U JP 7800487U JP S63187336 U JPS63187336 U JP S63187336U
Authority
JP
Japan
Prior art keywords
jig
wafer cassette
equipment
manufacturing equipment
semiconductor manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7800487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7800487U priority Critical patent/JPS63187336U/ja
Publication of JPS63187336U publication Critical patent/JPS63187336U/ja
Pending legal-status Critical Current

Links

JP7800487U 1987-05-22 1987-05-22 Pending JPS63187336U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7800487U JPS63187336U (enrdf_load_stackoverflow) 1987-05-22 1987-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7800487U JPS63187336U (enrdf_load_stackoverflow) 1987-05-22 1987-05-22

Publications (1)

Publication Number Publication Date
JPS63187336U true JPS63187336U (enrdf_load_stackoverflow) 1988-11-30

Family

ID=30926549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7800487U Pending JPS63187336U (enrdf_load_stackoverflow) 1987-05-22 1987-05-22

Country Status (1)

Country Link
JP (1) JPS63187336U (enrdf_load_stackoverflow)

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