JPS63187336U - - Google Patents
Info
- Publication number
- JPS63187336U JPS63187336U JP7800487U JP7800487U JPS63187336U JP S63187336 U JPS63187336 U JP S63187336U JP 7800487 U JP7800487 U JP 7800487U JP 7800487 U JP7800487 U JP 7800487U JP S63187336 U JPS63187336 U JP S63187336U
- Authority
- JP
- Japan
- Prior art keywords
- jig
- wafer cassette
- equipment
- manufacturing equipment
- semiconductor manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7800487U JPS63187336U (OSRAM) | 1987-05-22 | 1987-05-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7800487U JPS63187336U (OSRAM) | 1987-05-22 | 1987-05-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63187336U true JPS63187336U (OSRAM) | 1988-11-30 |
Family
ID=30926549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7800487U Pending JPS63187336U (OSRAM) | 1987-05-22 | 1987-05-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63187336U (OSRAM) |
-
1987
- 1987-05-22 JP JP7800487U patent/JPS63187336U/ja active Pending