JPS63187327U - - Google Patents
Info
- Publication number
- JPS63187327U JPS63187327U JP1987079075U JP7907587U JPS63187327U JP S63187327 U JPS63187327 U JP S63187327U JP 1987079075 U JP1987079075 U JP 1987079075U JP 7907587 U JP7907587 U JP 7907587U JP S63187327 U JPS63187327 U JP S63187327U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- thin film
- electrodes
- vacuum container
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987079075U JPS63187327U (enExample) | 1987-05-26 | 1987-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987079075U JPS63187327U (enExample) | 1987-05-26 | 1987-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63187327U true JPS63187327U (enExample) | 1988-11-30 |
Family
ID=30928603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987079075U Pending JPS63187327U (enExample) | 1987-05-26 | 1987-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63187327U (enExample) |
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1987
- 1987-05-26 JP JP1987079075U patent/JPS63187327U/ja active Pending