JPS63187326U - - Google Patents

Info

Publication number
JPS63187326U
JPS63187326U JP7894787U JP7894787U JPS63187326U JP S63187326 U JPS63187326 U JP S63187326U JP 7894787 U JP7894787 U JP 7894787U JP 7894787 U JP7894787 U JP 7894787U JP S63187326 U JPS63187326 U JP S63187326U
Authority
JP
Japan
Prior art keywords
side electrode
curved surface
substrate side
electrode
power supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7894787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7894787U priority Critical patent/JPS63187326U/ja
Publication of JPS63187326U publication Critical patent/JPS63187326U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP7894787U 1987-05-26 1987-05-26 Pending JPS63187326U (US07166745-20070123-C00016.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7894787U JPS63187326U (US07166745-20070123-C00016.png) 1987-05-26 1987-05-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7894787U JPS63187326U (US07166745-20070123-C00016.png) 1987-05-26 1987-05-26

Publications (1)

Publication Number Publication Date
JPS63187326U true JPS63187326U (US07166745-20070123-C00016.png) 1988-11-30

Family

ID=30928356

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7894787U Pending JPS63187326U (US07166745-20070123-C00016.png) 1987-05-26 1987-05-26

Country Status (1)

Country Link
JP (1) JPS63187326U (US07166745-20070123-C00016.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101402233B1 (ko) * 2008-01-23 2014-05-30 (주)소슬 플라즈마 식각 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101402233B1 (ko) * 2008-01-23 2014-05-30 (주)소슬 플라즈마 식각 장치

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