JPS63186776U - - Google Patents

Info

Publication number
JPS63186776U
JPS63186776U JP7588087U JP7588087U JPS63186776U JP S63186776 U JPS63186776 U JP S63186776U JP 7588087 U JP7588087 U JP 7588087U JP 7588087 U JP7588087 U JP 7588087U JP S63186776 U JPS63186776 U JP S63186776U
Authority
JP
Japan
Prior art keywords
substrate
holder
pins
outer periphery
pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7588087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7588087U priority Critical patent/JPS63186776U/ja
Publication of JPS63186776U publication Critical patent/JPS63186776U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP7588087U 1987-05-20 1987-05-20 Pending JPS63186776U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7588087U JPS63186776U (enrdf_load_stackoverflow) 1987-05-20 1987-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7588087U JPS63186776U (enrdf_load_stackoverflow) 1987-05-20 1987-05-20

Publications (1)

Publication Number Publication Date
JPS63186776U true JPS63186776U (enrdf_load_stackoverflow) 1988-11-30

Family

ID=30922434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7588087U Pending JPS63186776U (enrdf_load_stackoverflow) 1987-05-20 1987-05-20

Country Status (1)

Country Link
JP (1) JPS63186776U (enrdf_load_stackoverflow)

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