JPS63186766U - - Google Patents
Info
- Publication number
- JPS63186766U JPS63186766U JP7847387U JP7847387U JPS63186766U JP S63186766 U JPS63186766 U JP S63186766U JP 7847387 U JP7847387 U JP 7847387U JP 7847387 U JP7847387 U JP 7847387U JP S63186766 U JPS63186766 U JP S63186766U
- Authority
- JP
- Japan
- Prior art keywords
- viewing port
- gas phase
- reaction device
- phase reaction
- shutter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7847387U JPS63186766U (cs) | 1987-05-25 | 1987-05-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7847387U JPS63186766U (cs) | 1987-05-25 | 1987-05-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63186766U true JPS63186766U (cs) | 1988-11-30 |
Family
ID=30927451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7847387U Pending JPS63186766U (cs) | 1987-05-25 | 1987-05-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63186766U (cs) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5535331U (cs) * | 1978-08-23 | 1980-03-06 | ||
| JPS5961199A (ja) * | 1982-09-30 | 1984-04-07 | 三菱電機株式会社 | 透光性電磁遮蔽板及びその製造方法 |
-
1987
- 1987-05-25 JP JP7847387U patent/JPS63186766U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5535331U (cs) * | 1978-08-23 | 1980-03-06 | ||
| JPS5961199A (ja) * | 1982-09-30 | 1984-04-07 | 三菱電機株式会社 | 透光性電磁遮蔽板及びその製造方法 |