JPS63186589U - - Google Patents

Info

Publication number
JPS63186589U
JPS63186589U JP7651687U JP7651687U JPS63186589U JP S63186589 U JPS63186589 U JP S63186589U JP 7651687 U JP7651687 U JP 7651687U JP 7651687 U JP7651687 U JP 7651687U JP S63186589 U JPS63186589 U JP S63186589U
Authority
JP
Japan
Prior art keywords
robot hand
air chamber
utility
model registration
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7651687U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0627349Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987076516U priority Critical patent/JPH0627349Y2/ja
Publication of JPS63186589U publication Critical patent/JPS63186589U/ja
Application granted granted Critical
Publication of JPH0627349Y2 publication Critical patent/JPH0627349Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987076516U 1987-05-21 1987-05-21 ロボツトハンド Expired - Lifetime JPH0627349Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987076516U JPH0627349Y2 (ja) 1987-05-21 1987-05-21 ロボツトハンド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987076516U JPH0627349Y2 (ja) 1987-05-21 1987-05-21 ロボツトハンド

Publications (2)

Publication Number Publication Date
JPS63186589U true JPS63186589U (US07413550-20080819-C00001.png) 1988-11-30
JPH0627349Y2 JPH0627349Y2 (ja) 1994-07-27

Family

ID=30923670

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987076516U Expired - Lifetime JPH0627349Y2 (ja) 1987-05-21 1987-05-21 ロボツトハンド

Country Status (1)

Country Link
JP (1) JPH0627349Y2 (US07413550-20080819-C00001.png)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60180789A (ja) * 1984-02-25 1985-09-14 ソニー株式会社 クリ−ンル−ム内作業ロボツト装置
JPS6129633A (ja) * 1984-07-20 1986-02-10 Hitachi Ltd 移送装置
JPS6257882A (ja) * 1985-09-04 1987-03-13 株式会社椿本チエイン ウエハ搬送装置
JPS6294291A (ja) * 1985-10-21 1987-04-30 フアナツク株式会社 産業用ロボツトの防塵構造

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60180789A (ja) * 1984-02-25 1985-09-14 ソニー株式会社 クリ−ンル−ム内作業ロボツト装置
JPS6129633A (ja) * 1984-07-20 1986-02-10 Hitachi Ltd 移送装置
JPS6257882A (ja) * 1985-09-04 1987-03-13 株式会社椿本チエイン ウエハ搬送装置
JPS6294291A (ja) * 1985-10-21 1987-04-30 フアナツク株式会社 産業用ロボツトの防塵構造

Also Published As

Publication number Publication date
JPH0627349Y2 (ja) 1994-07-27

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