JPS63186555U - - Google Patents
Info
- Publication number
- JPS63186555U JPS63186555U JP7800787U JP7800787U JPS63186555U JP S63186555 U JPS63186555 U JP S63186555U JP 7800787 U JP7800787 U JP 7800787U JP 7800787 U JP7800787 U JP 7800787U JP S63186555 U JPS63186555 U JP S63186555U
- Authority
- JP
- Japan
- Prior art keywords
- brush roll
- sprayers
- cooling
- cleaning water
- sprayer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007921 spray Substances 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims 4
- 238000001816 cooling Methods 0.000 claims 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 4
- 230000001680 brushing effect Effects 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Nozzles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7800787U JPS63186555U (enExample) | 1987-05-22 | 1987-05-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7800787U JPS63186555U (enExample) | 1987-05-22 | 1987-05-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63186555U true JPS63186555U (enExample) | 1988-11-30 |
Family
ID=30926555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7800787U Pending JPS63186555U (enExample) | 1987-05-22 | 1987-05-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63186555U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015205355A (ja) * | 2014-04-17 | 2015-11-19 | 株式会社荏原製作所 | 冷却装置、及び、基板処理装置 |
-
1987
- 1987-05-22 JP JP7800787U patent/JPS63186555U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015205355A (ja) * | 2014-04-17 | 2015-11-19 | 株式会社荏原製作所 | 冷却装置、及び、基板処理装置 |