JPS63185576U - - Google Patents
Info
- Publication number
- JPS63185576U JPS63185576U JP7795887U JP7795887U JPS63185576U JP S63185576 U JPS63185576 U JP S63185576U JP 7795887 U JP7795887 U JP 7795887U JP 7795887 U JP7795887 U JP 7795887U JP S63185576 U JPS63185576 U JP S63185576U
- Authority
- JP
- Japan
- Prior art keywords
- magazine
- transport path
- pair
- belts
- reversible motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 210000000078 claw Anatomy 0.000 claims description 3
- 230000002441 reversible effect Effects 0.000 claims 3
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7795887U JPH065651Y2 (ja) | 1987-05-22 | 1987-05-22 | マガジンバツフア |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7795887U JPH065651Y2 (ja) | 1987-05-22 | 1987-05-22 | マガジンバツフア |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63185576U true JPS63185576U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-11-29 |
| JPH065651Y2 JPH065651Y2 (ja) | 1994-02-09 |
Family
ID=30926458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7795887U Expired - Lifetime JPH065651Y2 (ja) | 1987-05-22 | 1987-05-22 | マガジンバツフア |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH065651Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013071813A (ja) * | 2011-09-28 | 2013-04-22 | Toppan Forms Co Ltd | シートストッカ |
| JP2013071812A (ja) * | 2011-09-28 | 2013-04-22 | Toppan Forms Co Ltd | シートストッカ |
| KR101409687B1 (ko) * | 2011-07-04 | 2014-06-19 | 실트로닉 아게 | 다수의 웨이퍼형 가공물을 완충 보관하기 위한 장치 및 방법 |
-
1987
- 1987-05-22 JP JP7795887U patent/JPH065651Y2/ja not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101409687B1 (ko) * | 2011-07-04 | 2014-06-19 | 실트로닉 아게 | 다수의 웨이퍼형 가공물을 완충 보관하기 위한 장치 및 방법 |
| US9199791B2 (en) | 2011-07-04 | 2015-12-01 | Siltronic Ag | Device and method for buffer-storing a multiplicity of wafer-type workpieces |
| JP2013071813A (ja) * | 2011-09-28 | 2013-04-22 | Toppan Forms Co Ltd | シートストッカ |
| JP2013071812A (ja) * | 2011-09-28 | 2013-04-22 | Toppan Forms Co Ltd | シートストッカ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH065651Y2 (ja) | 1994-02-09 |