JPS63185237U - - Google Patents
Info
- Publication number
- JPS63185237U JPS63185237U JP1987076373U JP7637387U JPS63185237U JP S63185237 U JPS63185237 U JP S63185237U JP 1987076373 U JP1987076373 U JP 1987076373U JP 7637387 U JP7637387 U JP 7637387U JP S63185237 U JPS63185237 U JP S63185237U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrates
- storage cassette
- side plates
- substrates according
- supporting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987076373U JPS63185237U (enExample) | 1987-05-20 | 1987-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987076373U JPS63185237U (enExample) | 1987-05-20 | 1987-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63185237U true JPS63185237U (enExample) | 1988-11-29 |
Family
ID=30923388
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987076373U Pending JPS63185237U (enExample) | 1987-05-20 | 1987-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63185237U (enExample) |
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1987
- 1987-05-20 JP JP1987076373U patent/JPS63185237U/ja active Pending