JPS63185236U - - Google Patents

Info

Publication number
JPS63185236U
JPS63185236U JP7683687U JP7683687U JPS63185236U JP S63185236 U JPS63185236 U JP S63185236U JP 7683687 U JP7683687 U JP 7683687U JP 7683687 U JP7683687 U JP 7683687U JP S63185236 U JPS63185236 U JP S63185236U
Authority
JP
Japan
Prior art keywords
wafer
doping
impurities
chip
monitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7683687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7683687U priority Critical patent/JPS63185236U/ja
Publication of JPS63185236U publication Critical patent/JPS63185236U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP7683687U 1987-05-21 1987-05-21 Pending JPS63185236U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7683687U JPS63185236U (enrdf_load_stackoverflow) 1987-05-21 1987-05-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7683687U JPS63185236U (enrdf_load_stackoverflow) 1987-05-21 1987-05-21

Publications (1)

Publication Number Publication Date
JPS63185236U true JPS63185236U (enrdf_load_stackoverflow) 1988-11-29

Family

ID=30924286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7683687U Pending JPS63185236U (enrdf_load_stackoverflow) 1987-05-21 1987-05-21

Country Status (1)

Country Link
JP (1) JPS63185236U (enrdf_load_stackoverflow)

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