JPS63185225U - - Google Patents
Info
- Publication number
- JPS63185225U JPS63185225U JP1987075746U JP7574687U JPS63185225U JP S63185225 U JPS63185225 U JP S63185225U JP 1987075746 U JP1987075746 U JP 1987075746U JP 7574687 U JP7574687 U JP 7574687U JP S63185225 U JPS63185225 U JP S63185225U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- chemical liquid
- central
- center
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Nozzles (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987075746U JPS63185225U (enExample) | 1987-05-19 | 1987-05-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987075746U JPS63185225U (enExample) | 1987-05-19 | 1987-05-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63185225U true JPS63185225U (enExample) | 1988-11-29 |
Family
ID=30922177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987075746U Pending JPS63185225U (enExample) | 1987-05-19 | 1987-05-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63185225U (enExample) |
-
1987
- 1987-05-19 JP JP1987075746U patent/JPS63185225U/ja active Pending