JPS63185102U - - Google Patents

Info

Publication number

JPS63185102U

JPS63185102U JP7514887U JP7514887U JPS63185102U JP S63185102 U JPS63185102 U JP S63185102U JP 7514887 U JP7514887 U JP 7514887U JP 7514887 U JP7514887 U JP 7514887U JP S63185102 U JPS63185102 U JP S63185102U

Authority

JP

Japan

Prior art keywords

interference filter

multilayer film

film deposition

deposition layer

center

Prior art date

1987-05-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000008021 deposition Effects 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 7
• 238000003384 imaging method Methods 0.000 description 2
• 238000009434 installation Methods 0.000 description 1
• 230000003595 spectral effect Effects 0.000 description 1
• 238000002834 transmittance Methods 0.000 description 1

Cited By (1)