JPS63184686U - - Google Patents

Info

Publication number
JPS63184686U
JPS63184686U JP1987072839U JP7283987U JPS63184686U JP S63184686 U JPS63184686 U JP S63184686U JP 1987072839 U JP1987072839 U JP 1987072839U JP 7283987 U JP7283987 U JP 7283987U JP S63184686 U JPS63184686 U JP S63184686U
Authority
JP
Japan
Prior art keywords
processing head
laser processing
passage hole
flow path
speed gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987072839U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987072839U priority Critical patent/JPS63184686U/ja
Publication of JPS63184686U publication Critical patent/JPS63184686U/ja
Pending legal-status Critical Current

Links

JP1987072839U 1987-05-18 1987-05-18 Pending JPS63184686U (me)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987072839U JPS63184686U (me) 1987-05-18 1987-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987072839U JPS63184686U (me) 1987-05-18 1987-05-18

Publications (1)

Publication Number Publication Date
JPS63184686U true JPS63184686U (me) 1988-11-28

Family

ID=30916643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987072839U Pending JPS63184686U (me) 1987-05-18 1987-05-18

Country Status (1)

Country Link
JP (1) JPS63184686U (me)

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