JPS63184685U - - Google Patents
Info
- Publication number
- JPS63184685U JPS63184685U JP1987072610U JP7261087U JPS63184685U JP S63184685 U JPS63184685 U JP S63184685U JP 1987072610 U JP1987072610 U JP 1987072610U JP 7261087 U JP7261087 U JP 7261087U JP S63184685 U JPS63184685 U JP S63184685U
- Authority
- JP
- Japan
- Prior art keywords
- position detection
- positioning device
- detection arm
- processing
- focus positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987072610U JPS63184685U (de) | 1987-05-15 | 1987-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987072610U JPS63184685U (de) | 1987-05-15 | 1987-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63184685U true JPS63184685U (de) | 1988-11-28 |
Family
ID=30916212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987072610U Pending JPS63184685U (de) | 1987-05-15 | 1987-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63184685U (de) |
-
1987
- 1987-05-15 JP JP1987072610U patent/JPS63184685U/ja active Pending