JPS63184551U - - Google Patents
Info
- Publication number
- JPS63184551U JPS63184551U JP7476887U JP7476887U JPS63184551U JP S63184551 U JPS63184551 U JP S63184551U JP 7476887 U JP7476887 U JP 7476887U JP 7476887 U JP7476887 U JP 7476887U JP S63184551 U JPS63184551 U JP S63184551U
- Authority
- JP
- Japan
- Prior art keywords
- specimen
- electron microscope
- electromagnetic chuck
- closed
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7476887U JPS63184551U (enExample) | 1987-05-19 | 1987-05-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7476887U JPS63184551U (enExample) | 1987-05-19 | 1987-05-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63184551U true JPS63184551U (enExample) | 1988-11-28 |
Family
ID=30920292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7476887U Pending JPS63184551U (enExample) | 1987-05-19 | 1987-05-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63184551U (enExample) |
-
1987
- 1987-05-19 JP JP7476887U patent/JPS63184551U/ja active Pending