JPS63183266U - - Google Patents
Info
- Publication number
- JPS63183266U JPS63183266U JP7298487U JP7298487U JPS63183266U JP S63183266 U JPS63183266 U JP S63183266U JP 7298487 U JP7298487 U JP 7298487U JP 7298487 U JP7298487 U JP 7298487U JP S63183266 U JPS63183266 U JP S63183266U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- process tube
- workpiece
- reaction gas
- inner tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7298487U JPS63183266U (enExample) | 1987-05-18 | 1987-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7298487U JPS63183266U (enExample) | 1987-05-18 | 1987-05-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63183266U true JPS63183266U (enExample) | 1988-11-25 |
Family
ID=30916918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7298487U Pending JPS63183266U (enExample) | 1987-05-18 | 1987-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63183266U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6252200A (ja) * | 1985-08-28 | 1987-03-06 | Nec Corp | 気相エピタキシヤル成長装置 |
-
1987
- 1987-05-18 JP JP7298487U patent/JPS63183266U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6252200A (ja) * | 1985-08-28 | 1987-03-06 | Nec Corp | 気相エピタキシヤル成長装置 |