JPS63183264U - - Google Patents

Info

Publication number

JPS63183264U

JPS63183264U JP7240887U JP7240887U JPS63183264U JP S63183264 U JPS63183264 U JP S63183264U JP 7240887 U JP7240887 U JP 7240887U JP 7240887 U JP7240887 U JP 7240887U JP S63183264 U JPS63183264 U JP S63183264U

Authority

JP

Japan

Prior art keywords

crystal

utility

model registration

oscillation type

thickness sensor

Prior art date

1987-05-15

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000013078 crystal Substances 0.000 claims description 7
• 239000010408 film Substances 0.000 claims description 4
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
• 229910052782 aluminium Inorganic materials 0.000 claims description 3
• 239000010409 thin film Substances 0.000 claims description 3
• 230000010355 oscillation Effects 0.000 claims 2
• 239000010931 gold Substances 0.000 description 1
• 229910052737 gold Inorganic materials 0.000 description 1
• 239000010453 quartz Substances 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1