JPS63182562U - - Google Patents

Info

Publication number
JPS63182562U
JPS63182562U JP7301487U JP7301487U JPS63182562U JP S63182562 U JPS63182562 U JP S63182562U JP 7301487 U JP7301487 U JP 7301487U JP 7301487 U JP7301487 U JP 7301487U JP S63182562 U JPS63182562 U JP S63182562U
Authority
JP
Japan
Prior art keywords
laser
cylindrical
laser tube
repetition
partition wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7301487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH073652Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7301487U priority Critical patent/JPH073652Y2/ja
Publication of JPS63182562U publication Critical patent/JPS63182562U/ja
Application granted granted Critical
Publication of JPH073652Y2 publication Critical patent/JPH073652Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Lasers (AREA)
JP7301487U 1987-05-18 1987-05-18 高繰り返しエキシマレ−ザ装置 Expired - Lifetime JPH073652Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7301487U JPH073652Y2 (ja) 1987-05-18 1987-05-18 高繰り返しエキシマレ−ザ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7301487U JPH073652Y2 (ja) 1987-05-18 1987-05-18 高繰り返しエキシマレ−ザ装置

Publications (2)

Publication Number Publication Date
JPS63182562U true JPS63182562U (US20030199744A1-20031023-C00003.png) 1988-11-24
JPH073652Y2 JPH073652Y2 (ja) 1995-01-30

Family

ID=30916973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7301487U Expired - Lifetime JPH073652Y2 (ja) 1987-05-18 1987-05-18 高繰り返しエキシマレ−ザ装置

Country Status (1)

Country Link
JP (1) JPH073652Y2 (US20030199744A1-20031023-C00003.png)

Also Published As

Publication number Publication date
JPH073652Y2 (ja) 1995-01-30

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