JPS63182560U - - Google Patents

Info

Publication number
JPS63182560U
JPS63182560U JP1987074195U JP7419587U JPS63182560U JP S63182560 U JPS63182560 U JP S63182560U JP 1987074195 U JP1987074195 U JP 1987074195U JP 7419587 U JP7419587 U JP 7419587U JP S63182560 U JPS63182560 U JP S63182560U
Authority
JP
Japan
Prior art keywords
metal plate
piezoelectric element
ceramic actuator
thickness
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987074195U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987074195U priority Critical patent/JPS63182560U/ja
Publication of JPS63182560U publication Critical patent/JPS63182560U/ja
Pending legal-status Critical Current

Links

JP1987074195U 1987-05-18 1987-05-18 Pending JPS63182560U (US06486227-20021126-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987074195U JPS63182560U (US06486227-20021126-C00005.png) 1987-05-18 1987-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987074195U JPS63182560U (US06486227-20021126-C00005.png) 1987-05-18 1987-05-18

Publications (1)

Publication Number Publication Date
JPS63182560U true JPS63182560U (US06486227-20021126-C00005.png) 1988-11-24

Family

ID=30919189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987074195U Pending JPS63182560U (US06486227-20021126-C00005.png) 1987-05-18 1987-05-18

Country Status (1)

Country Link
JP (1) JPS63182560U (US06486227-20021126-C00005.png)

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