JPS63182559U - - Google Patents

Info

Publication number
JPS63182559U
JPS63182559U JP7419487U JP7419487U JPS63182559U JP S63182559 U JPS63182559 U JP S63182559U JP 7419487 U JP7419487 U JP 7419487U JP 7419487 U JP7419487 U JP 7419487U JP S63182559 U JPS63182559 U JP S63182559U
Authority
JP
Japan
Prior art keywords
metal plate
thin metal
ceramic actuator
piezoelectric element
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7419487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7419487U priority Critical patent/JPS63182559U/ja
Publication of JPS63182559U publication Critical patent/JPS63182559U/ja
Pending legal-status Critical Current

Links

JP7419487U 1987-05-18 1987-05-18 Pending JPS63182559U (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7419487U JPS63182559U (it) 1987-05-18 1987-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7419487U JPS63182559U (it) 1987-05-18 1987-05-18

Publications (1)

Publication Number Publication Date
JPS63182559U true JPS63182559U (it) 1988-11-24

Family

ID=30919187

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7419487U Pending JPS63182559U (it) 1987-05-18 1987-05-18

Country Status (1)

Country Link
JP (1) JPS63182559U (it)

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