JPS63182548A - Evaluating method for ultra cleanliness and measuring instrument used for the same - Google Patents
Evaluating method for ultra cleanliness and measuring instrument used for the sameInfo
- Publication number
- JPS63182548A JPS63182548A JP1577587A JP1577587A JPS63182548A JP S63182548 A JPS63182548 A JP S63182548A JP 1577587 A JP1577587 A JP 1577587A JP 1577587 A JP1577587 A JP 1577587A JP S63182548 A JPS63182548 A JP S63182548A
- Authority
- JP
- Japan
- Prior art keywords
- cleanliness
- air
- dust
- ultra
- target air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003749 cleanliness Effects 0.000 title claims abstract description 49
- 238000000034 method Methods 0.000 title claims description 3
- 238000005070 sampling Methods 0.000 claims abstract description 28
- 238000012360 testing method Methods 0.000 claims abstract description 7
- 239000002245 particle Substances 0.000 claims description 20
- 238000011156 evaluation Methods 0.000 claims description 17
- 239000000428 dust Substances 0.000 abstract description 5
- 238000005259 measurement Methods 0.000 abstract description 5
- 239000010419 fine particle Substances 0.000 abstract 1
- 238000000528 statistical test Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
Landscapes
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、超ＬＳＩ等の製造成いは研究開発を行うクリ
ーンルーム内の超清浄度の評価方法および該評価方法に
使用される測定装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for evaluating ultra-cleanliness in a clean room for manufacturing or researching and developing ultra-LSIs, and a measuring device used in the evaluation method. .
従来、清浄空気の評価は、サンプリング管内に測定空気
を吸引しこれにレーザ光を照射し、レーザ光が粒子に衝
突し散乱する光を光センサにより検出しているが、現在
、清浄空気の評価については、米国連邦規格で規定され
ているクラス１００、クラス１，０００、クラス１０，
０００、クラス１００．０００について評価が行われて
いる。これは、粒子径０．５μｍ以上の粒子数が、１ｒ
ｔ３の立方体の中にそれぞれ１００個、１，０００個、
１０，０００個、１００．０００個存在することを意味
している。Conventionally, clean air evaluation involves sucking measurement air into a sampling tube, irradiating it with laser light, and detecting the scattered light when the laser light collides with particles using an optical sensor. For class 100, class 1,000, class 10,
000 and class 100.000 are being evaluated. This means that the number of particles with a particle size of 0.5 μm or more is 1r.
100 pieces, 1,000 pieces, respectively in the cube of t3,
This means that there are 10,000 or 100,000 pieces.
しかしながら、対象粒子径が０． １μｍ、クラス１
（１個／ｆｔ３）さらには対象粒子径が０゜０３μｍ、
クラス０．５ （１個／２ ｆ ｔ３）といった超清浄
空気の正確な評価方法はなかった。However, the target particle size is 0. 1μm, class 1
(1 piece/ft3) Furthermore, the target particle diameter is 0°03μm,
There was no accurate evaluation method for ultra-clean air such as class 0.5 (1 piece/2 ft3).
これは、レーザパーティクルカウンタでは粒子径が０．
１μｍのものまで計測可能であり、また、粒子を飽和ア
ルコールの中を通過させ粒子径を大にしてから計測する
ＣＮＣカウンタでは、粒子径が０．０２〜０．０３μｍ
のものまで計測可能であるが、測定器のバックグランド
計数値（真に無塵の空気をサンプリングした場合でも粒
子数をカウントする値）が問題となり正確に評価が出来
ないためである。この測定器のハックグランド計数値は
、周囲の静電気、電磁波等の影響により測定器がノイズ
を発生し、これをカウントする値が主なものであるが、
他に測定器内の空気流路等の汚染により、ここから粒子
が発生してハックグランド計数値に加算される場合もあ
る。This means that the laser particle counter has a particle size of 0.
It is possible to measure particles down to 1 μm, and CNC counters that pass particles through saturated alcohol to increase the particle size before measuring can measure particles with a particle size of 0.02 to 0.03 μm.
Although it is possible to measure even particles, the background count value of the measuring device (a value that counts the number of particles even when sampling truly dust-free air) becomes a problem and cannot be accurately evaluated. The hack ground count value of this measuring device is mainly a value that counts noise generated by the measuring device due to the influence of surrounding static electricity, electromagnetic waves, etc.
In addition, particles may be generated due to contamination of the air flow path within the measuring instrument and added to the Hackland count value.
本発明は上記問題を解決するものであって、バックグラ
ンド計数値が現場により異なっていても、限りなくＯに
近い超清浄度をも評価できる超清浄度の評価方法および
該評価方法に使用される測定装置を提供することを目的
とする。The present invention solves the above-mentioned problems, and provides an ultracleanliness evaluation method that can evaluate ultracleanliness as close as possible to O even if the background count value varies from site to site, and is used in the evaluation method. The purpose is to provide a measuring device that
そのために本発明の超清浄度の評価方法は、無塵空気の
清浄度であるバックグランド計数値と対象空気の清浄度
とを測定し、これらバックグランド計数値と対象空気の
清浄度とを統計的に検定し、有意であれば両者の平均値
の差をその対象空気の清浄度とし、有意でないならば、
その対象空気の清浄度を無塵空気の清浄度と同じと見做
すことを特徴とし、また、本発明の超清浄度の評価方法
に使用される測定装置は、無塵空気発生器と、サンプリ
ング管と、該サンプリング管に接続される微粒子測定器
とからなり、前記サンプリング管はサンプリング管固定
器具により固定位置が可変可能に構成され、前記無塵空
気発生器から発生する無塵空気と対象空気の両者の清浄
度を測定可能にすることを特徴とするものである。For this purpose, the ultra-cleanliness evaluation method of the present invention measures the background count value, which is the cleanliness of dust-free air, and the cleanliness of the target air, and statistically calculates the background count value and the cleanliness of the target air. If it is significant, the difference between the two average values is taken as the cleanliness of the target air, and if it is not significant,
The cleanliness of the target air is considered to be the same as the cleanliness of dust-free air, and the measuring device used in the ultra-cleanliness evaluation method of the present invention includes a dust-free air generator, It consists of a sampling tube and a particulate measuring device connected to the sampling tube, and the sampling tube is configured so that its fixing position can be changed by a sampling tube fixing device, and the sampling tube is configured such that the fixing position thereof can be varied, and the dust-free air generated from the dust-free air generator and the object are It is characterized by being able to measure the cleanliness of both air.
本発明においては例えば第１図に示すように、先ず、サ
ンプリング管１７を水平に倒して第２図点線の位置にし
、無塵空気発生器１１からでる無塵空気をサンプリング
して微粒子測定器１２のバックグランド計数値を測定し
、次に、サンプリング管１７を垂直に起こして、クリー
ンルーム１内の空気を等速サンプリングし、クリーンル
ーム１内の微粒子を測定する。そして、これらバックグ
ランド計数値と測定対象データとを統計的に検定し、有
意であれば両者の平均値の差をその対象空気の清浄度と
し、有意でないならば、そのその対象空気の清浄度は無
塵空気の清浄度と同じと見做し、清浄度をクラスＯとす
るものである。In the present invention, for example, as shown in FIG. 1, first, the sampling tube 17 is laid down horizontally to the position indicated by the dotted line in FIG. Next, the sampling tube 17 is raised vertically to sample the air in the clean room 1 at a constant velocity, and the particles in the clean room 1 are measured. Then, statistically test these background counts and the measurement target data, and if significant, the difference between the average values of the two is determined as the cleanliness of the target air, and if not significant, the cleanliness of the target air. The cleanliness is considered to be the same as that of dust-free air, and the cleanliness is classified as class O.
以下、本発明の実施例について図面を参照しつつ説明す
る。第１図は本発明の超清浄度の評価方法および該評価
方法に使用される測定装置の１実施例を説明するための
図、第２図は本発明の超清浄度の評価方法に使用される
測定装置の要部を示す側面図である。図中、１はクリー
ンルーム、２はフィルタ、３はグレーチング床、４．５
はダクト、６はフィルタ、７は空調機、８はファン、９
・・・クリーンユニット、１０は超清浄度測定装置、１
１は無塵空気発生器、１２は微粒子測定器、１３．１４
・・・台車、１５はフ・アン、１６はＵ Ｌ Ｐ Ａフ
ィルタ、１７・・・サンプリング管、１８はサンプリン
グ管固定器具、１９・・・測定器本体、２０は支持具、
２１は可撓性管、２２は溝を示す。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram for explaining an embodiment of the ultra-cleanliness evaluation method of the present invention and a measuring device used in the evaluation method, and FIG. 2 is a diagram for explaining an embodiment of the ultra-cleanliness evaluation method of the present invention. FIG. 2 is a side view showing main parts of the measuring device. In the figure, 1 is a clean room, 2 is a filter, 3 is a grating floor, 4.5
is a duct, 6 is a filter, 7 is an air conditioner, 8 is a fan, 9
...Clean unit, 10 is ultra cleanliness measuring device, 1
1 is a dust-free air generator, 12 is a particulate meter, 13.14
... Cart, 15 is a fan, 16 is a U L P A filter, 17... sampling tube, 18 is a sampling tube fixing device, 19... measuring instrument body, 20 is a support,
21 is a flexible tube, and 22 is a groove.
第１図において、クリーンルーム１の天井部には、ＨＥ
ＰＡフィルタ、Ｕ Ｔ−Ｐ Ａフィルタ、スーパーＵＬ
ＰＡフィルタ等の捕集効率の高いフィルタ２が配設され
、クリーンルーム１の天井部およびグレーチング床３に
は、ダクト４．５を介してフィルタ６、空調機７および
ファン８を備えるクリーンユニット９が連結されている
。In Figure 1, there is a HE
PA filter, U T-PA filter, super UL
A filter 2 with high collection efficiency such as a PA filter is installed, and a clean unit 9 including a filter 6, an air conditioner 7 and a fan 8 is installed on the ceiling and grating floor 3 of the clean room 1 via a duct 4.5. connected.
超清浄度測定装置１０は、無塵空気発生器１１と微粒子
測定器１２から構成され、それぞれ移動可能な台車１３
．１４上に載置されている。無塵空気発生器１１は、フ
ァン１５により吸引した空気を３枚のＵ Ｌ Ｐ Ａフ
ィルタ１６を通過させ無塵空気を発生させるものである
。ＵＬＰＡフィルタ１６は、例えば０．１μｍに対して
捕集効率が９９．９９９％で３枚のＵＬＰＡフィルタ１
６の総合捕集効率は９９．９９・・・９９（１５ナイン
）％で、これを通過した空気は真に無塵の空気と見做す
ことができる。The ultra-cleanliness measuring device 10 is composed of a dust-free air generator 11 and a particulate measuring device 12, each of which is equipped with a movable trolley 13.
．． It is placed on 14. The dust-free air generator 11 generates dust-free air by passing air sucked by a fan 15 through three ULP A filters 16. The ULPA filter 16 has a collection efficiency of 99.999% for 0.1 μm, for example, and is composed of three ULPA filters 1.
The overall collection efficiency of No. 6 is 99.99...99 (15 nines)%, and the air that passes through this can be regarded as truly dust-free air.
微粒子測定器１２は、サンプリング管１７、サンプリン
グ管固定器具１８および測定器本体１９からなり、第２
図に詳細に示すように、サンプリング管１７は支持具２
０を介して塩ビ管等の可撓性管２１と接続されると共に
、サンプリング管固定器具１８は、サンプリング管１７
の支持具２゜が固定器具１日の溝２２に沿って回動可能
に形成され、これによりサンプリング管１７を垂直に立
ててクリーンルーム１内の空気を吸引したり、例えば、
矢印Ａに示すように水平にして無塵空気発生器１１から
でる空気を吸引することができるように、固定位置が可
変になるように形成されている。また、微粒子測定器１
２の必要条件はサンプリング管１７に近づいてサンプリ
ングの位置を換える際に、人からの発塵により測定値の
信頼性が低下するのを防止することである。The particle measuring device 12 consists of a sampling tube 17, a sampling tube fixing device 18, and a measuring device main body 19.
As shown in detail in the figure, the sampling tube 17 is connected to the support 2.
0, and the sampling tube fixing device 18 is connected to a flexible tube 21 such as a PVC tube through the sampling tube 17.
A support 2° is formed to be rotatable along a groove 22 of the fixture, so that the sampling tube 17 can be vertically erected to suck the air in the clean room 1, for example.
It is formed so that its fixed position is variable so that it can be placed horizontally as shown by arrow A and the air coming out of the dust-free air generator 11 can be sucked. In addition, particulate measuring device 1
The second requirement is to prevent the reliability of measured values from decreasing due to dust generated by people when approaching the sampling tube 17 and changing the sampling position.
次に測定方法について説明すると、先ず、サンプリング
管１７を水平に倒して第２図点線の位置にし、無塵空気
発生器１１からでる無塵空気をサンプリングして微粒子
測定器１２のハックグランド計数値を測定し、次に、サ
ンプリング管１７を垂直に起こして、クリーンルーム１
内の空気を等速サンプリングし、クリーンルーム１内の
微粒子を測定する。そして、これらハックグランド計数
値と測定対象データとを統計的に検定し、有意であれば
両者の平均値の差をその対象空気の清浄度とし、有意で
ないならば、そのその対象空気の清浄度は無塵空気の清
浄度と同じと見做し、清浄度がクラスＯとするものであ
る。Next, to explain the measurement method, first, the sampling tube 17 is laid down horizontally to the position shown by the dotted line in Figure 2, the dust-free air coming out from the dust-free air generator 11 is sampled, and the hack grand count value of the particulate meter 12 is measured. Next, the sampling tube 17 is raised vertically and the clean room 1 is opened.
The air inside the clean room 1 is sampled at a constant velocity, and the particles inside the clean room 1 are measured. Then, statistically test these hack grand count values and the measurement target data, and if significant, the difference between the average values of the two is determined as the cleanliness of the target air, and if not significant, the cleanliness of the target air. The cleanliness is considered to be the same as that of dust-free air, and the cleanliness is class O.
次に、本発明による超清浄度の評価方法の評価例につい
て説明すると、次ページの表１は上記した評価装置を用
いて測定した結果を示し、無塵空気によるハックグラン
ドを１５回測定した値と、クリーンルーム内を２０回測
定した値を示している。Next, to explain an evaluation example of the ultra-cleanliness evaluation method according to the present invention, Table 1 on the next page shows the results measured using the above-mentioned evaluation device, and the values obtained by measuring hack ground using dust-free air 15 times. This shows the value obtained by measuring the inside of the clean room 20 times.
表１
上記表１で得られたデータを基にバックグランドデータ
と測定データの存意義検定をも分布を用いて行う例を以
下に説明する。Table 1 An example will be described below in which the existence significance test of background data and measurement data is also performed using distribution based on the data obtained in Table 1 above.
ハックグランド値の符号をｂ、測定値の符号をｍとし、
それぞれの平均値をＭ、 、Ｍ、 、標準偏差をＳＤｌ
、５Ｄ１１、サンプル数をＮ、 、Ｎ、とすると、変数
ｔ ＝ （ＭＩＲ−Ｍｂ ）／ＳＤ’ （１／ Ｎｂ
＋ １／ ＮＩＩ）ＳＯ’ −（（ＳＤｂ ”＋３０ｍ
”）／（Ｎ ｂ ＋Ｎｍ −２） ） ””は自由度
（Ｎ ｂ ＋）ｉ、−２）のｔ分布に従うことが証明さ
れている。上式に表１のデータから得られるＭｂ ＝０
．１３３ 、ＳＤｂ −０，３５２、Ｎｂ ＝１５ＭＩ
Ｉ＝０．１５０ 、Ｓ ＤＩｌｌ＝０．３６６ 、ＮＩ
Ｉ＝２０を代入すると、ｔ０＝０．５Ｅ＋６となる。Let the sign of the hack grand value be b, the sign of the measured value be m,
The respective mean values are M, , M, and standard deviations are SDl.
, 5D11, when the number of samples is N, ,N, variable t = (MIR-Mb)/SD' (1/Nb
+ 1/NII) SO' -((SDb ”+30m
``)/(N b + Nm -2) ) '' has been proven to follow the t distribution with degrees of freedom (N b +)i, -2).In the above equation, Mb = 0 obtained from the data in Table 1
．． 133, SDb -0,352, Nb = 15MI
I=0.150, SDIll=0.366, NI
Substituting I=20 gives t0=0.5E+6.
次にｔ表より危険率αのときのｔ （Ｎ ｂ ＋Ｎイ
ー２゜α）を求める。危険率α−０，０５のとき、ｔ
（１５＋２０−２．０．０５）
＝ｔ （３３，０，０５）＝２．０３となる。Next, from the t table, find t (N b +N2°α) when the risk rate is α. When the risk factor α-0.05, t
(15+20-2.0.05)=t(33,0,05)=2.03.
ｔ ｏ ＞ ｔ （Ｎ ｂ ＋Ｎｍ−２，α）が成立
すれば、ハックグランドデータと測定データに有意な差
があると判断してよく、両者の平均値の差をその対象空
気の清浄度とするが、この場合のように、ｔ、＝０．５
６６＜ｔ （３３，０，０５）＝２゜０３の場合には
、両者に有意な差がないとしてその対象空気の清浄度を
無塵空気の清浄度と同じと見做し、清浄度を０個／ｆｔ
３と判定する。If t o > t (N b +Nm-2, α) holds, it can be determined that there is a significant difference between the hack ground data and the measured data, and the difference between the average values of the two can be calculated as the cleanliness of the target air. But, as in this case, t,=0.5
If 66<t (33,0,05)=2°03, it is assumed that there is no significant difference between the two, and the cleanliness of the target air is considered to be the same as that of dust-free air, and the cleanliness is 0 pieces/ft
It is judged as 3.
なお、本発明は上記実施例に限定されるものではなく、
種々の変更が可能である。例えば、上記実施例において
は、バックグランドデータと測定データの有意義検定を
ｔ分布を用いて行っているが、他の検定手法を用いても
よい。Note that the present invention is not limited to the above embodiments,
Various modifications are possible. For example, in the above embodiment, the significance test between the background data and the measured data is performed using the t-distribution, but other test methods may be used.
以上説明したように本発明によれば、無塵空気の清浄度
であるバックグランド計数値と対象空気の清浄度とを測
定し、これらハックグランド計数値と対象空気の清浄度
とを統計的に検定し、有意であれば両者の平均値の差を
その対象空気の清浄度とし、有意でないならば、その対
象空気の清浄度を無塵空気の清浄度と同じと見做し、清
浄度０個／ｆｔ”とするものであるから、ハックグラン
ド計数値が現場により異なっていても、限りなくＯに近
い超清浄環をも評価することができる。As explained above, according to the present invention, the background count value, which is the cleanliness of dust-free air, and the cleanliness of the target air are measured, and these hack ground count values and the cleanliness of the target air are statistically calculated. If the difference between the average values is significant, the cleanliness of the target air is determined as the cleanliness of the target air, and if it is not significant, the cleanliness of the target air is considered to be the same as the cleanliness of dust-free air, and the cleanliness is 0. Therefore, even if the Hack Grand count value varies depending on the site, it is possible to evaluate an ultra-clean ring as close to O as possible.
第１図は本発明の超清浄環の評価方法および該評価方法
に使用される測定装置の１実施例を説明するための図、
第２図は本発明の超清浄環の評価方法に使用される測定
装置の要部を示す側面図である。
１・・・クリーンルーム、２・・・フィルタ、３・・・
グレーチング床、４．５・・・ダクト、６・・・フィル
タ、７・・・空ｇＩＪ１１．８・・・ファン、９・・・
クリーンユニット、１０・・・超清浄環測定装置、１１
・・・無塵空気発生器、１２・・・微粒子測定器、１３
．１４・・・台車、１５・・・ファン、１６・・・ＵＬ
ＰＡフィルタ、１７・・・サンプリング管、１８・・・
サンプリング管固定器具、１９・・・測定器本体、２０
・・・支持具、２１・・・可撓性管、２２・・・溝。FIG. 1 is a diagram for explaining an embodiment of the ultra-clean ring evaluation method of the present invention and a measuring device used in the evaluation method;
FIG. 2 is a side view showing the main parts of a measuring device used in the ultra-clean ring evaluation method of the present invention. 1...Clean room, 2...Filter, 3...
Grating floor, 4.5...Duct, 6...Filter, 7...Empty gIJ11.8...Fan, 9...
Clean unit, 10... Ultra clean ring measuring device, 11
...Dust-free air generator, 12...Particle measuring device, 13
．． 14... Trolley, 15... Fan, 16... UL
PA filter, 17... sampling tube, 18...
Sampling tube fixing device, 19... Measuring instrument body, 20
...Support, 21...Flexible tube, 22...Groove.
Claims (2)
対象空気の清浄度とを測定し、これらバックグランド計
数値と対象空気の清浄度とを統計的に検定し、有意であ
れば両者の平均値の差をその対象空気の清浄度とし、有
意でないならば、その対象空気の清浄度を無塵空気の清
浄度と同じと見做すことを特徴とする超清浄度の評価方
法。(1) Measure the background count value, which is the cleanliness of the dust-free air, and the cleanliness of the target air, and statistically test the background count value and the cleanliness of the target air. A method for evaluating ultra-cleanliness, characterized in that the difference between the average values of is regarded as the cleanliness of the target air, and if it is not significant, the cleanliness of the target air is considered to be the same as the cleanliness of dust-free air.
対象空気の清浄度とを測定し、これらバックグランド計
数値と対象空気の清浄度とを統計的に検定し、有意であ
れば両者の平均値の差をその対象空気の清浄度とし、有
意でないならば、その対象空気の清浄度を無塵空気の清
浄度と同じと見做すことを特徴とする超清浄度の評価方
法に使用される測定装置であって、該測定装置は無塵空
気発生器と、サンプリング管と、該サンプリング管に接
続される微粒子測定器とからなり、前記サンプリング管
はサンプリング管固定器具により固定位置が可変可能に
構成され、前記無塵空気発生器から発生する無塵空気と
対象空気の両者の清浄度を測定可能にすることを特徴と
する超清浄度の評価方法に使用される測定装置。(2) Measure the background count value, which is the cleanliness of the dust-free air, and the cleanliness of the target air, statistically test these background count values and the cleanliness of the target air, and if they are significant, both The difference between the average values of is regarded as the cleanliness of the target air, and if it is not significant, the cleanliness of the target air is regarded as the same as the cleanliness of dust-free air. The measuring device used includes a dust-free air generator, a sampling tube, and a particle measuring device connected to the sampling tube, and the sampling tube is fixed at a fixed position by a sampling tube fixing device. A measuring device used in an ultra-cleanliness evaluation method, characterized in that it is configured to be variable and is capable of measuring the cleanliness of both the dust-free air generated from the dust-free air generator and the target air.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62015775A JPH0830675B2 (en) | 1987-01-26 | 1987-01-26 | Ultra-cleanliness evaluation method and measuring device used in the evaluation method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62015775A JPH0830675B2 (en) | 1987-01-26 | 1987-01-26 | Ultra-cleanliness evaluation method and measuring device used in the evaluation method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63182548A true JPS63182548A (en) | 1988-07-27 |
| JPH0830675B2 JPH0830675B2 (en) | 1996-03-27 |
Family
ID=11898188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62015775A Expired - Lifetime JPH0830675B2 (en) | 1987-01-26 | 1987-01-26 | Ultra-cleanliness evaluation method and measuring device used in the evaluation method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0830675B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07151653A (en) * | 1993-11-30 | 1995-06-16 | Sumika Bunseki Center:Kk | Sample kit and sampling/analyzing method |
| JP2002357346A (en) * | 2001-03-29 | 2002-12-13 | Ricoh Co Ltd | Clean room |
| JP2013217805A (en) * | 2012-04-10 | 2013-10-24 | Azbil Corp | Position recording system of particle measuring apparatus and position recording method of particle measuring apparatus |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6124107B2 (en) * | 2012-08-28 | 2017-05-10 | エヌ・ティ・ティ・エイ・ティ・クリエイティブ株式会社 | Measuring method of detection object |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5868641A (en) * | 1981-10-20 | 1983-04-23 | Masabumi Kato | Air analysis-reporting system for clean room and monitor card used in said system |
-
1987
- 1987-01-26 JP JP62015775A patent/JPH0830675B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5868641A (en) * | 1981-10-20 | 1983-04-23 | Masabumi Kato | Air analysis-reporting system for clean room and monitor card used in said system |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07151653A (en) * | 1993-11-30 | 1995-06-16 | Sumika Bunseki Center:Kk | Sample kit and sampling/analyzing method |
| JP2002357346A (en) * | 2001-03-29 | 2002-12-13 | Ricoh Co Ltd | Clean room |
| JP2013217805A (en) * | 2012-04-10 | 2013-10-24 | Azbil Corp | Position recording system of particle measuring apparatus and position recording method of particle measuring apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0830675B2 (en) | 1996-03-27 |
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