JPS63182525U - - Google Patents
Info
- Publication number
- JPS63182525U JPS63182525U JP7393887U JP7393887U JPS63182525U JP S63182525 U JPS63182525 U JP S63182525U JP 7393887 U JP7393887 U JP 7393887U JP 7393887 U JP7393887 U JP 7393887U JP S63182525 U JPS63182525 U JP S63182525U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7393887U JPS63182525U (OSRAM) | 1987-05-18 | 1987-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7393887U JPS63182525U (OSRAM) | 1987-05-18 | 1987-05-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63182525U true JPS63182525U (OSRAM) | 1988-11-24 |
Family
ID=30918713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7393887U Pending JPS63182525U (OSRAM) | 1987-05-18 | 1987-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63182525U (OSRAM) |
-
1987
- 1987-05-18 JP JP7393887U patent/JPS63182525U/ja active Pending