JPS63181858U - - Google Patents

Info

Publication number

JPS63181858U

JPS63181858U JP7080987U JP7080987U JPS63181858U JP S63181858 U JPS63181858 U JP S63181858U JP 7080987 U JP7080987 U JP 7080987U JP 7080987 U JP7080987 U JP 7080987U JP S63181858 U JPS63181858 U JP S63181858U

Authority

JP

Japan

Prior art keywords

inlet port

gas inlet

gas

activated carbon

semiconductor type

Prior art date

1987-05-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 10
• 239000004065 semiconductor Substances 0.000 claims description 4
• 238000010586 diagram Methods 0.000 description 2
• 230000035945 sensitivity Effects 0.000 description 1

Cited By (1)