JPS63180932U - - Google Patents
Info
- Publication number
- JPS63180932U JPS63180932U JP7210487U JP7210487U JPS63180932U JP S63180932 U JPS63180932 U JP S63180932U JP 7210487 U JP7210487 U JP 7210487U JP 7210487 U JP7210487 U JP 7210487U JP S63180932 U JPS63180932 U JP S63180932U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- wafer container
- inclusion
- wafers
- container according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 claims 5
- 239000011888 foil Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000005871 repellent Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7210487U JPS63180932U (da) | 1987-05-13 | 1987-05-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7210487U JPS63180932U (da) | 1987-05-13 | 1987-05-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63180932U true JPS63180932U (da) | 1988-11-22 |
Family
ID=30915262
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7210487U Pending JPS63180932U (da) | 1987-05-13 | 1987-05-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63180932U (da) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005112106A1 (ja) * | 2004-05-19 | 2005-11-24 | Nippon Mining & Metals Co., Ltd. | ウェハ保管容器 |
-
1987
- 1987-05-13 JP JP7210487U patent/JPS63180932U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005112106A1 (ja) * | 2004-05-19 | 2005-11-24 | Nippon Mining & Metals Co., Ltd. | ウェハ保管容器 |
US7510082B2 (en) | 2004-05-19 | 2009-03-31 | Nippon Mining & Metals Co., Ltd. | Wafer storage container |