JPS63180052U - - Google Patents

Info

Publication number

JPS63180052U

JPS63180052U JP6905687U JP6905687U JPS63180052U JP S63180052 U JPS63180052 U JP S63180052U JP 6905687 U JP6905687 U JP 6905687U JP 6905687 U JP6905687 U JP 6905687U JP S63180052 U JPS63180052 U JP S63180052U

Authority

JP

Japan

Prior art keywords

heater

far

infrared

air

fan

Prior art date

1987-05-09

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims 2
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
• 229910052782 aluminium Inorganic materials 0.000 claims 1
• 238000007664 blowing Methods 0.000 claims 1
• 238000005524 ceramic coating Methods 0.000 claims 1
• 238000010438 heat treatment Methods 0.000 claims 1
• 230000001678 irradiating effect Effects 0.000 claims 1
• 239000007788 liquid Substances 0.000 claims 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
• 239000000919 ceramic Substances 0.000 description 1