JPS63179510U - - Google Patents

Info

Publication number
JPS63179510U
JPS63179510U JP6816587U JP6816587U JPS63179510U JP S63179510 U JPS63179510 U JP S63179510U JP 6816587 U JP6816587 U JP 6816587U JP 6816587 U JP6816587 U JP 6816587U JP S63179510 U JPS63179510 U JP S63179510U
Authority
JP
Japan
Prior art keywords
stage
control section
laser interferometer
stop position
data memory
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6816587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6816587U priority Critical patent/JPS63179510U/ja
Publication of JPS63179510U publication Critical patent/JPS63179510U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
JP6816587U 1987-05-06 1987-05-06 Pending JPS63179510U (US07655688-20100202-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6816587U JPS63179510U (US07655688-20100202-C00086.png) 1987-05-06 1987-05-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6816587U JPS63179510U (US07655688-20100202-C00086.png) 1987-05-06 1987-05-06

Publications (1)

Publication Number Publication Date
JPS63179510U true JPS63179510U (US07655688-20100202-C00086.png) 1988-11-21

Family

ID=30907730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6816587U Pending JPS63179510U (US07655688-20100202-C00086.png) 1987-05-06 1987-05-06

Country Status (1)

Country Link
JP (1) JPS63179510U (US07655688-20100202-C00086.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60140408A (ja) * 1983-12-28 1985-07-25 Hitachi Ltd 外観検査装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60140408A (ja) * 1983-12-28 1985-07-25 Hitachi Ltd 外観検査装置

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