JPS63178353U - - Google Patents

Info

Publication number

JPS63178353U

JPS63178353U JP7081587U JP7081587U JPS63178353U JP S63178353 U JPS63178353 U JP S63178353U JP 7081587 U JP7081587 U JP 7081587U JP 7081587 U JP7081587 U JP 7081587U JP S63178353 U JPS63178353 U JP S63178353U

Authority

JP

Japan

Prior art keywords

diaphragm

silicon substrate

measurement pressure

pressure sensor

semiconductor pressure

Prior art date

1987-05-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 6
• 239000004065 semiconductor Substances 0.000 claims description 5
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
• 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
• 229910052710 silicon Inorganic materials 0.000 claims description 3
• 239000010703 silicon Substances 0.000 claims description 3
• 238000005259 measurement Methods 0.000 claims 2
• 238000010586 diagram Methods 0.000 description 3
• 238000000034 method Methods 0.000 description 3