JPS63178329U - - Google Patents

Info

Publication number
JPS63178329U
JPS63178329U JP4953588U JP4953588U JPS63178329U JP S63178329 U JPS63178329 U JP S63178329U JP 4953588 U JP4953588 U JP 4953588U JP 4953588 U JP4953588 U JP 4953588U JP S63178329 U JPS63178329 U JP S63178329U
Authority
JP
Japan
Prior art keywords
chuck
screw shaft
reciprocates
screw
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4953588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4953588U priority Critical patent/JPS63178329U/ja
Publication of JPS63178329U publication Critical patent/JPS63178329U/ja
Pending legal-status Critical Current

Links

JP4953588U 1988-04-13 1988-04-13 Pending JPS63178329U (US20100268047A1-20101021-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4953588U JPS63178329U (US20100268047A1-20101021-C00003.png) 1988-04-13 1988-04-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4953588U JPS63178329U (US20100268047A1-20101021-C00003.png) 1988-04-13 1988-04-13

Publications (1)

Publication Number Publication Date
JPS63178329U true JPS63178329U (US20100268047A1-20101021-C00003.png) 1988-11-18

Family

ID=30872075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4953588U Pending JPS63178329U (US20100268047A1-20101021-C00003.png) 1988-04-13 1988-04-13

Country Status (1)

Country Link
JP (1) JPS63178329U (US20100268047A1-20101021-C00003.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4941291A (US20100268047A1-20101021-C00003.png) * 1972-08-28 1974-04-18
JPS513743U (US20100268047A1-20101021-C00003.png) * 1974-06-25 1976-01-12
JPS58118125A (ja) * 1982-01-05 1983-07-14 Tatsumo Kk 基板の搬送装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4941291A (US20100268047A1-20101021-C00003.png) * 1972-08-28 1974-04-18
JPS513743U (US20100268047A1-20101021-C00003.png) * 1974-06-25 1976-01-12
JPS58118125A (ja) * 1982-01-05 1983-07-14 Tatsumo Kk 基板の搬送装置

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