JPS63178319U - - Google Patents
Info
- Publication number
- JPS63178319U JPS63178319U JP6901687U JP6901687U JPS63178319U JP S63178319 U JPS63178319 U JP S63178319U JP 6901687 U JP6901687 U JP 6901687U JP 6901687 U JP6901687 U JP 6901687U JP S63178319 U JPS63178319 U JP S63178319U
- Authority
- JP
- Japan
- Prior art keywords
- lid
- push rod
- chamber
- closing mechanism
- pressure cvd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6901687U JPS63178319U (enExample) | 1987-05-09 | 1987-05-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6901687U JPS63178319U (enExample) | 1987-05-09 | 1987-05-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63178319U true JPS63178319U (enExample) | 1988-11-18 |
Family
ID=30909366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6901687U Pending JPS63178319U (enExample) | 1987-05-09 | 1987-05-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63178319U (enExample) |
-
1987
- 1987-05-09 JP JP6901687U patent/JPS63178319U/ja active Pending