JPS63177956U - - Google Patents

Info

Publication number
JPS63177956U
JPS63177956U JP6702987U JP6702987U JPS63177956U JP S63177956 U JPS63177956 U JP S63177956U JP 6702987 U JP6702987 U JP 6702987U JP 6702987 U JP6702987 U JP 6702987U JP S63177956 U JPS63177956 U JP S63177956U
Authority
JP
Japan
Prior art keywords
reaction chamber
sample
door
forming container
taking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6702987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6702987U priority Critical patent/JPS63177956U/ja
Publication of JPS63177956U publication Critical patent/JPS63177956U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP6702987U 1987-05-02 1987-05-02 Pending JPS63177956U (US20100268047A1-20101021-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6702987U JPS63177956U (US20100268047A1-20101021-C00003.png) 1987-05-02 1987-05-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6702987U JPS63177956U (US20100268047A1-20101021-C00003.png) 1987-05-02 1987-05-02

Publications (1)

Publication Number Publication Date
JPS63177956U true JPS63177956U (US20100268047A1-20101021-C00003.png) 1988-11-17

Family

ID=30905569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6702987U Pending JPS63177956U (US20100268047A1-20101021-C00003.png) 1987-05-02 1987-05-02

Country Status (1)

Country Link
JP (1) JPS63177956U (US20100268047A1-20101021-C00003.png)

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