JPS63177954U - - Google Patents
Info
- Publication number
- JPS63177954U JPS63177954U JP6983887U JP6983887U JPS63177954U JP S63177954 U JPS63177954 U JP S63177954U JP 6983887 U JP6983887 U JP 6983887U JP 6983887 U JP6983887 U JP 6983887U JP S63177954 U JPS63177954 U JP S63177954U
- Authority
- JP
- Japan
- Prior art keywords
- target electrode
- vacuum
- rod
- substrate holder
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 230000003028 elevating effect Effects 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6983887U JPS63177954U (enExample) | 1987-05-11 | 1987-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6983887U JPS63177954U (enExample) | 1987-05-11 | 1987-05-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63177954U true JPS63177954U (enExample) | 1988-11-17 |
Family
ID=30910925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6983887U Pending JPS63177954U (enExample) | 1987-05-11 | 1987-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63177954U (enExample) |
-
1987
- 1987-05-11 JP JP6983887U patent/JPS63177954U/ja active Pending