JPS63177846U - - Google Patents

Info

Publication number
JPS63177846U
JPS63177846U JP1987068777U JP6877787U JPS63177846U JP S63177846 U JPS63177846 U JP S63177846U JP 1987068777 U JP1987068777 U JP 1987068777U JP 6877787 U JP6877787 U JP 6877787U JP S63177846 U JPS63177846 U JP S63177846U
Authority
JP
Japan
Prior art keywords
photomask
long
patterning
utility
registration request
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987068777U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987068777U priority Critical patent/JPS63177846U/ja
Publication of JPS63177846U publication Critical patent/JPS63177846U/ja
Pending legal-status Critical Current

Links

JP1987068777U 1987-05-07 1987-05-07 Pending JPS63177846U (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987068777U JPS63177846U (en, 2012) 1987-05-07 1987-05-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987068777U JPS63177846U (en, 2012) 1987-05-07 1987-05-07

Publications (1)

Publication Number Publication Date
JPS63177846U true JPS63177846U (en, 2012) 1988-11-17

Family

ID=30908908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987068777U Pending JPS63177846U (en, 2012) 1987-05-07 1987-05-07

Country Status (1)

Country Link
JP (1) JPS63177846U (en, 2012)

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