JPS63177683U - - Google Patents

Info

Publication number

JPS63177683U

JPS63177683U JP6680687U JP6680687U JPS63177683U JP S63177683 U JPS63177683 U JP S63177683U JP 6680687 U JP6680687 U JP 6680687U JP 6680687 U JP6680687 U JP 6680687U JP S63177683 U JPS63177683 U JP S63177683U

Authority

JP

Japan

Prior art keywords

vacuum pump

vacuum

detection section

function

section

Prior art date

1987-05-06

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001514 detection method Methods 0.000 claims description 4
• 238000004092 self-diagnosis Methods 0.000 claims description 2
• 238000010586 diagram Methods 0.000 description 1