JPS63177048U - - Google Patents
Info
- Publication number
- JPS63177048U JPS63177048U JP6717387U JP6717387U JPS63177048U JP S63177048 U JPS63177048 U JP S63177048U JP 6717387 U JP6717387 U JP 6717387U JP 6717387 U JP6717387 U JP 6717387U JP S63177048 U JPS63177048 U JP S63177048U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- roller
- periphery
- auxiliary member
- rotating roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6717387U JPS63177048U (ar) | 1987-04-30 | 1987-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6717387U JPS63177048U (ar) | 1987-04-30 | 1987-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63177048U true JPS63177048U (ar) | 1988-11-16 |
Family
ID=30905839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6717387U Pending JPS63177048U (ar) | 1987-04-30 | 1987-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63177048U (ar) |
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1987
- 1987-04-30 JP JP6717387U patent/JPS63177048U/ja active Pending