JPS63177047U - - Google Patents

Info

Publication number
JPS63177047U
JPS63177047U JP6672087U JP6672087U JPS63177047U JP S63177047 U JPS63177047 U JP S63177047U JP 6672087 U JP6672087 U JP 6672087U JP 6672087 U JP6672087 U JP 6672087U JP S63177047 U JPS63177047 U JP S63177047U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
wafer
carrier
utility
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6672087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6672087U priority Critical patent/JPS63177047U/ja
Publication of JPS63177047U publication Critical patent/JPS63177047U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP6672087U 1987-04-30 1987-04-30 Pending JPS63177047U (US06653308-20031125-C00197.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6672087U JPS63177047U (US06653308-20031125-C00197.png) 1987-04-30 1987-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6672087U JPS63177047U (US06653308-20031125-C00197.png) 1987-04-30 1987-04-30

Publications (1)

Publication Number Publication Date
JPS63177047U true JPS63177047U (US06653308-20031125-C00197.png) 1988-11-16

Family

ID=30904989

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6672087U Pending JPS63177047U (US06653308-20031125-C00197.png) 1987-04-30 1987-04-30

Country Status (1)

Country Link
JP (1) JPS63177047U (US06653308-20031125-C00197.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007273643A (ja) * 2006-03-30 2007-10-18 Phyzchemix Corp ウエハカセット及びウエハ収容方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007273643A (ja) * 2006-03-30 2007-10-18 Phyzchemix Corp ウエハカセット及びウエハ収容方法

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