JPS63176866U - - Google Patents

Info

Publication number
JPS63176866U
JPS63176866U JP2471187U JP2471187U JPS63176866U JP S63176866 U JPS63176866 U JP S63176866U JP 2471187 U JP2471187 U JP 2471187U JP 2471187 U JP2471187 U JP 2471187U JP S63176866 U JPS63176866 U JP S63176866U
Authority
JP
Japan
Prior art keywords
chamber
track
clean air
communicates
clean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2471187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2471187U priority Critical patent/JPS63176866U/ja
Publication of JPS63176866U publication Critical patent/JPS63176866U/ja
Pending legal-status Critical Current

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  • Ventilation (AREA)
JP2471187U 1987-02-21 1987-02-21 Pending JPS63176866U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2471187U JPS63176866U (enrdf_load_stackoverflow) 1987-02-21 1987-02-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2471187U JPS63176866U (enrdf_load_stackoverflow) 1987-02-21 1987-02-21

Publications (1)

Publication Number Publication Date
JPS63176866U true JPS63176866U (enrdf_load_stackoverflow) 1988-11-16

Family

ID=30824190

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2471187U Pending JPS63176866U (enrdf_load_stackoverflow) 1987-02-21 1987-02-21

Country Status (1)

Country Link
JP (1) JPS63176866U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5522830A (en) * 1978-08-04 1980-02-18 Nippon Telegr & Teleph Corp <Ntt> Unit cell for logic lsi chip

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5522830A (en) * 1978-08-04 1980-02-18 Nippon Telegr & Teleph Corp <Ntt> Unit cell for logic lsi chip

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