JPS63176577U - - Google Patents
Info
- Publication number
- JPS63176577U JPS63176577U JP6939187U JP6939187U JPS63176577U JP S63176577 U JPS63176577 U JP S63176577U JP 6939187 U JP6939187 U JP 6939187U JP 6939187 U JP6939187 U JP 6939187U JP S63176577 U JPS63176577 U JP S63176577U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- opening
- liquid
- guiding
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図はこの考案の一実施例を示す断面図、第
２図は従来のレジスト塗布用ノズルを示す断面図
である。
図において、１はパイプ、２０は基部、３０は
フタ、４０はキヤツプである。各図中、同一符号
は同一又は相当部分を示す。
FIG. 1 is a sectional view showing an embodiment of this invention, and FIG. 2 is a sectional view showing a conventional resist coating nozzle. In the figure, 1 is a pipe, 20 is a base, 30 is a lid, and 40 is a cap. In each figure, the same reference numerals indicate the same or corresponding parts.
Claims (1)
取り付けられ、下面に互いに離れた位置にて開口
する複数の吐出口を有するキヤツプを備えた液体
塗布用ノズル。 A liquid application nozzle comprising a pipe for guiding a liquid, and a cap attached to the opening of the pipe and having a plurality of discharge ports opening at positions separated from each other on the lower surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6939187U JPS63176577U (en) | 1987-05-07 | 1987-05-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6939187U JPS63176577U (en) | 1987-05-07 | 1987-05-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63176577U true JPS63176577U (en) | 1988-11-16 |
Family
ID=30910087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6939187U Pending JPS63176577U (en) | 1987-05-07 | 1987-05-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63176577U (en) |
-
1987
- 1987-05-07 JP JP6939187U patent/JPS63176577U/ja active Pending