JPS63175833U - - Google Patents
Info
- Publication number
- JPS63175833U JPS63175833U JP6579087U JP6579087U JPS63175833U JP S63175833 U JPS63175833 U JP S63175833U JP 6579087 U JP6579087 U JP 6579087U JP 6579087 U JP6579087 U JP 6579087U JP S63175833 U JPS63175833 U JP S63175833U
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- thin
- ring
- pressure sensor
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図はこの考案の実施例の縦断面図、第２図
は同じく実施例の分解斜視図、第３図は同じく実
施例の水晶薄板の底面図、第４図は同じく実施例
の水晶基板の一部拡大断面図、第５図はこの考案
の他の実施例の縦断面図、第６図は同じく他の実
施例の水晶薄板の底面図、第７図はこの考案の実
施例の使用状態における正面図である。
１…水晶薄板、２…水晶環体、３…水晶基板。
Fig. 1 is a longitudinal sectional view of an embodiment of this invention, Fig. 2 is an exploded perspective view of the embodiment, Fig. 3 is a bottom view of a thin crystal plate of the embodiment, and Fig. 4 is a crystal substrate of the embodiment. 5 is a longitudinal sectional view of another embodiment of this invention, FIG. 6 is a bottom view of a thin crystal plate of another embodiment, and FIG. 7 is a use of this embodiment of the invention. It is a front view in a state. 1... Crystal thin plate, 2... Crystal ring body, 3... Crystal substrate.
Claims (1)
されており、水晶環体の内側における水晶基板と
水晶薄板の対向面に、夫々電極板が設けてあるこ
とを特徴とした圧力センサ。 ２ 水晶薄板は、周縁部に水晶環体が一体的に設
けられている実用新案登録請求の範囲第１項記載
の圧力センサ。[Claims for Utility Model Registration] 1. A crystal substrate and a thin crystal plate are arranged opposite each other with a crystal ring interposed therebetween, and electrode plates are respectively provided on opposing surfaces of the crystal substrate and the thin crystal plate inside the crystal ring. A pressure sensor characterized by: 2. The pressure sensor according to claim 1, wherein the thin crystal plate is integrally provided with a crystal ring at its peripheral edge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6579087U JPS63175833U (en) | 1987-04-30 | 1987-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6579087U JPS63175833U (en) | 1987-04-30 | 1987-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63175833U true JPS63175833U (en) | 1988-11-15 |
Family
ID=30903190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6579087U Pending JPS63175833U (en) | 1987-04-30 | 1987-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63175833U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005172483A (en) * | 2003-12-09 | 2005-06-30 | Toyo Commun Equip Co Ltd | Pressure sensor |
-
1987
- 1987-04-30 JP JP6579087U patent/JPS63175833U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005172483A (en) * | 2003-12-09 | 2005-06-30 | Toyo Commun Equip Co Ltd | Pressure sensor |