JPS63175826U - - Google Patents

Info

Publication number

JPS63175826U

JPS63175826U JP6761687U JP6761687U JPS63175826U JP S63175826 U JPS63175826 U JP S63175826U JP 6761687 U JP6761687 U JP 6761687U JP 6761687 U JP6761687 U JP 6761687U JP S63175826 U JPS63175826 U JP S63175826U

Authority

JP

Japan

Prior art keywords

cold finger

insertion chamber

dure

finger insertion

surrounding atmosphere

Prior art date

1987-05-06

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000037431 insertion Effects 0.000 claims description 4
• 238000003780 insertion Methods 0.000 claims description 4
• 238000001514 detection method Methods 0.000 claims description 2
• 239000012528 membrane Substances 0.000 claims description 2
• 238000005192 partition Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 230000002123 temporal effect Effects 0.000 description 1